A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Semiconductor processing equipment
The invention discloses semiconductor processing equipment, which comprises a box body with an opening on one surface; the box door is arranged at the opening in an openable manner through a hinge assembly; the annular sealing gasket is arranged between the box door and the box body and is used for sealing the opening after the box door closes the box body; when the door is closed, the box door rotates through the hinge assembly until the box door is parallel to the box body, and then linearly moves close to the box body in the direction perpendicular to the box body so as to extrude the annular sealing gasket, and the opening is closed and sealed. According to the semiconductor processing equipment box door, the box body is sealed through the annular sealing gasket, the box door achieves rotary motion and linear motion through the hinge assembly, meanwhile, the problem that the annular sealing gasket is distorted and deformed in the closing process of the box door is solved, and the sealing performance of the semiconductor processing equipment box door can be improved.
本申请公开了一种半导体处理设备，包括：箱体，一面设有开口；箱门，通过铰接组件可打开地设置于所述开口处；环形密封垫，设置于所述箱门和所述箱体之间，用于在所述箱门关闭所述箱体后对所述开口进行密封；关门时，所述箱门通过所述铰接组件做旋转运动，并运动至所述箱门与所述箱体平行，然后向垂直于所述箱体的方向做靠近所述箱体的直线运动以挤压所述环形密封垫，将所述开口关闭并密封。本申请通过环形密封垫对箱体进行密封，并且箱门通过铰接组件实现旋转运动和直线运动，同时解决了环形密封垫在箱门关闭的过程中发生扭曲变形的问题，可以改善半导体处理设备箱门的密封性。
Semiconductor processing equipment
The invention discloses semiconductor processing equipment, which comprises a box body with an opening on one surface; the box door is arranged at the opening in an openable manner through a hinge assembly; the annular sealing gasket is arranged between the box door and the box body and is used for sealing the opening after the box door closes the box body; when the door is closed, the box door rotates through the hinge assembly until the box door is parallel to the box body, and then linearly moves close to the box body in the direction perpendicular to the box body so as to extrude the annular sealing gasket, and the opening is closed and sealed. According to the semiconductor processing equipment box door, the box body is sealed through the annular sealing gasket, the box door achieves rotary motion and linear motion through the hinge assembly, meanwhile, the problem that the annular sealing gasket is distorted and deformed in the closing process of the box door is solved, and the sealing performance of the semiconductor processing equipment box door can be improved.
本申请公开了一种半导体处理设备，包括：箱体，一面设有开口；箱门，通过铰接组件可打开地设置于所述开口处；环形密封垫，设置于所述箱门和所述箱体之间，用于在所述箱门关闭所述箱体后对所述开口进行密封；关门时，所述箱门通过所述铰接组件做旋转运动，并运动至所述箱门与所述箱体平行，然后向垂直于所述箱体的方向做靠近所述箱体的直线运动以挤压所述环形密封垫，将所述开口关闭并密封。本申请通过环形密封垫对箱体进行密封，并且箱门通过铰接组件实现旋转运动和直线运动，同时解决了环形密封垫在箱门关闭的过程中发生扭曲变形的问题，可以改善半导体处理设备箱门的密封性。
Semiconductor processing equipment
半导体处理设备
YAN SHIQUAN (author) / FANG YANG (author) / YUAN HECHUAN (author)
2024-10-29
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05D
Scharniere oder andere Aufhängevorrichtungen für Türen, Fenster oder Flügel
,
HINGES OR OTHER SUSPENSION DEVICES FOR DOORS, WINDOWS, OR WINGS
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