A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
HANDLE SUBSTRATE FOR COMPOSITE SUBSTRATE FOR SEMICONDUCTOR AND COMPOSITE SUBSTRATE FOR SEMICONDUCTOR
An alumina purity of translucent polycrystalline alumina forming a handle substrate is 99.9 percent or higher, and a porosity of the polycrystalline alumina is 0.01% or more and 0.1% or less. A number of pores, each having a size of 0. 5µm or larger and included in a surface region on a side of a bonding face of the handle substrate is 0.5 times or less of a number of pores, each having a size of 0.1 µm or larger and 0.3 µm or smaller and contained in the surface region.
HANDLE SUBSTRATE FOR COMPOSITE SUBSTRATE FOR SEMICONDUCTOR AND COMPOSITE SUBSTRATE FOR SEMICONDUCTOR
An alumina purity of translucent polycrystalline alumina forming a handle substrate is 99.9 percent or higher, and a porosity of the polycrystalline alumina is 0.01% or more and 0.1% or less. A number of pores, each having a size of 0. 5µm or larger and included in a surface region on a side of a bonding face of the handle substrate is 0.5 times or less of a number of pores, each having a size of 0.1 µm or larger and 0.3 µm or smaller and contained in the surface region.
HANDLE SUBSTRATE FOR COMPOSITE SUBSTRATE FOR SEMICONDUCTOR AND COMPOSITE SUBSTRATE FOR SEMICONDUCTOR
GRIFFSUBSTRAT FÜR VERBUNDSUBSTRAT FÜR HALBLEITER UND VERBUNDSUBSTRAT FÜR HALBLEITER
SUBSTRAT DE MANIPULATION POUR SUBSTRAT COMPOSITE POUR SEMI-CONDUCTEUR ET SUBSTRAT COMPOSITE POUR SEMI-CONDUCTEUR
MIYAZAWA SUGIO (author) / IWASAKI YASUNORI (author) / TAKAGAKI TATSURO (author) / IDE AKIYOSHI (author) / NAKANISHI HIROKAZU (author)
2020-12-02
Patent
Electronic Resource
English
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
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