A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC FILM-EQUIPPED SUBSTRATE AND PIEZOELECTRIC ELEMENT
There are provided a piezoelectric film-attached substrate and piezoelectric element, which include, on a substrate in the following order, a lower electrode layer, a piezoelectric film containing a perovskite-type oxide containing lead as a main component of an A site, and a buffer layer, where the buffer layer contains a metal oxide represented by MdN1-dOe. Here, M consists of one or more metal elements substitutable for the A site of the perovskite-type oxide and has an electronegativity of less than 0.95. In a case of 0 < d < 1 and in a case where the electronegativity is denoted by X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958.
PIEZOELECTRIC FILM-EQUIPPED SUBSTRATE AND PIEZOELECTRIC ELEMENT
There are provided a piezoelectric film-attached substrate and piezoelectric element, which include, on a substrate in the following order, a lower electrode layer, a piezoelectric film containing a perovskite-type oxide containing lead as a main component of an A site, and a buffer layer, where the buffer layer contains a metal oxide represented by MdN1-dOe. Here, M consists of one or more metal elements substitutable for the A site of the perovskite-type oxide and has an electronegativity of less than 0.95. In a case of 0 < d < 1 and in a case where the electronegativity is denoted by X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958.
PIEZOELECTRIC FILM-EQUIPPED SUBSTRATE AND PIEZOELECTRIC ELEMENT
SUBSTRAT MIT PIEZOELEKTRISCHEM FILM UND PIEZOELEKTRISCHES ELEMENT
SUBSTRAT ÉQUIPÉ DE FILM PIÉZOÉLECTRIQUE ET ÉLÉMENT PIÉZOÉLECTRIQUE
UMEDA KENICHI (author)
2024-01-17
Patent
Electronic Resource
English
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