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    WAFER SUPPORT

    New search for: YAMAGISHI WATARU
    New search for: MORI KAZUMASA
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    A wafer support 10 includes a base material 14 including a machinable ceramic, a protective layer 16 covering a surface of the base material, and conductive members 18 and 20 placed at least partially inside the base material. The protective layer 16 includes a material that is less corrodible by plasma than the base material 14.

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    WAFER SUPPORT

    New search for: YAMAGISHI WATARU
    New search for: MORI KAZUMASA
    New search for: KOUNO HITOSHI
    New search for: ETO SHUNICHI

    A wafer support 10 includes a base material 14 including a machinable ceramic, a protective layer 16 covering a surface of the base material, and conductive members 18 and 20 placed at least partially inside the base material. The protective layer 16 includes a material that is less corrodible by plasma than the base material 14.

    Access

    Download

    WAFER SUPPORT

    New search for: YAMAGISHI WATARU
    New search for: MORI KAZUMASA
    New search for: KOUNO HITOSHI
    New search for: ETO SHUNICHI

    A wafer support 10 includes a base material 14 including a machinable ceramic, a protective layer 16 covering a surface of the base material, and conductive members 18 and 20 placed at least partially inside the base material. The protective layer 16 includes a material that is less corrodible by plasma than the base material 14.

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    Document information
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    Document information
    Title:

    WAFER SUPPORT

    Additional title:

    WAFERTRÄGER
    SUPPORT DE TRANCHE

    Contributors:

    YAMAGISHI WATARU (author) / MORI KAZUMASA (author) / KOUNO HITOSHI (author) / ETO SHUNICHI (author)

    Publication date:

    2025-01-15

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / H05B ELECTRIC HEATING , Elektrische Heizung

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