A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
HOLDING MEMBER
PROBLEM TO BE SOLVED: To provide a holding member having low reflective index and high specific rigidity, in use of holding a substrate being a processing target at exposure processing.SOLUTION: A holding member includes an alumina-based sintered compact containing Mn, Fe and Cr. Based on 100 mass% of whole components consisting of the alumina-based sintered compact, the content of Al is 85-90 mass% in terms of AlO. A ratio of a value in terms of CrOis 50-80% with regard to the sum total of the Mn in terms of MnO, the Fe in terms of FeO, and the Cr in terms of CrO. The surface roughness Ra is 0.1-1.8 μm.
【課題】 露光処理時における被処理物である基板の保持用途において、反射率が低く、かつ比剛性の高い保持部材を提供する。【解決手段】 Ｍｎ、Ｆｅ、Ｃｒを含むアルミナ質焼結体からなり、アルミナ質焼結体を構成する全成分100質量％のうち、ＡｌをＡｌ２Ｏ３換算した含有量が85質量％以上90質量％以下であり、ＭｎをＭｎＯ２換算、ＦｅをＦｅ２Ｏ３換算、ＣｒをＣｒ２Ｏ３換算した値の合計に対するＣｒ２Ｏ３換算した値の割合が50％以上80％以下であり、表面粗さＲａが0.1μｍ以上1.8μｍ以下の保持部材である。【選択図】 なし
HOLDING MEMBER
PROBLEM TO BE SOLVED: To provide a holding member having low reflective index and high specific rigidity, in use of holding a substrate being a processing target at exposure processing.SOLUTION: A holding member includes an alumina-based sintered compact containing Mn, Fe and Cr. Based on 100 mass% of whole components consisting of the alumina-based sintered compact, the content of Al is 85-90 mass% in terms of AlO. A ratio of a value in terms of CrOis 50-80% with regard to the sum total of the Mn in terms of MnO, the Fe in terms of FeO, and the Cr in terms of CrO. The surface roughness Ra is 0.1-1.8 μm.
【課題】 露光処理時における被処理物である基板の保持用途において、反射率が低く、かつ比剛性の高い保持部材を提供する。【解決手段】 Ｍｎ、Ｆｅ、Ｃｒを含むアルミナ質焼結体からなり、アルミナ質焼結体を構成する全成分100質量％のうち、ＡｌをＡｌ２Ｏ３換算した含有量が85質量％以上90質量％以下であり、ＭｎをＭｎＯ２換算、ＦｅをＦｅ２Ｏ３換算、ＣｒをＣｒ２Ｏ３換算した値の合計に対するＣｒ２Ｏ３換算した値の割合が50％以上80％以下であり、表面粗さＲａが0.1μｍ以上1.8μｍ以下の保持部材である。【選択図】 なし
HOLDING MEMBER
保持部材
TAKENOSHITA HIDEHIRO (author) / YAMAMOTO HIROSUKE (author) / TOYODA SATOSHI (author) / FURUTACHI KENICHI (author)
2015-06-04
Patent
Electronic Resource
Japanese
MOLD HOLDING MEMBER AND MANUFACTURING METHOD FOR MOLD HOLDING MEMBER
| European Patent Office | 2016