A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
BOARD HOLDING MEMBER
To provide a board holding member capable of suppressing the generation of heat spots or cold spots not only when a board is a uniformly flat plane but also when the board is warped.SOLUTION: A board holding member 100 includes a ceramic base material 110. A top surface 111 of the ceramic base material 110 is provided with an annular projection 152 arranged on the outer periphery of the top surface 111 and a plurality of projections 156 arranged inside the annular projection 152. An envelope of the cross-sectional line of the upper surface 156a of the plurality of projections 156 is a straight line perpendicular to the vertical direction 5 (straight line parallel to the horizontal plane), and the cross-sectional line of the upper surface 152a of the annular projection 152 is a straight line that slopes downward toward the inside in the radial direction.SELECTED DRAWING: Figure 2
【課題】基板が一様に平坦な平面である場合だけでなく、基板が反っている場合であってもヒートスポット又はコールドスポットの発生を抑制できる基板保持部材を提供する。【解決手段】基板保持部材１００は、セラミックス基材１１０を備えている。セラミックス基材１１０の上面１１１には、上面１１１の外周部に配置された環状の環状凸部１５２と、環状凸部１５２の内側に配置された複数の凸部１５６とが設けられている。複数の凸部１５６の上面１５６ａの断面線の包絡線が上下方向５に直交する直線（水平面に平行な直線）であり、環状凸部１５２の上面１５２ａの断面線は径方向の内側に向かって下がるように傾斜する直線である。【選択図】 図２
BOARD HOLDING MEMBER
To provide a board holding member capable of suppressing the generation of heat spots or cold spots not only when a board is a uniformly flat plane but also when the board is warped.SOLUTION: A board holding member 100 includes a ceramic base material 110. A top surface 111 of the ceramic base material 110 is provided with an annular projection 152 arranged on the outer periphery of the top surface 111 and a plurality of projections 156 arranged inside the annular projection 152. An envelope of the cross-sectional line of the upper surface 156a of the plurality of projections 156 is a straight line perpendicular to the vertical direction 5 (straight line parallel to the horizontal plane), and the cross-sectional line of the upper surface 152a of the annular projection 152 is a straight line that slopes downward toward the inside in the radial direction.SELECTED DRAWING: Figure 2
【課題】基板が一様に平坦な平面である場合だけでなく、基板が反っている場合であってもヒートスポット又はコールドスポットの発生を抑制できる基板保持部材を提供する。【解決手段】基板保持部材１００は、セラミックス基材１１０を備えている。セラミックス基材１１０の上面１１１には、上面１１１の外周部に配置された環状の環状凸部１５２と、環状凸部１５２の内側に配置された複数の凸部１５６とが設けられている。複数の凸部１５６の上面１５６ａの断面線の包絡線が上下方向５に直交する直線（水平面に平行な直線）であり、環状凸部１５２の上面１５２ａの断面線は径方向の内側に向かって下がるように傾斜する直線である。【選択図】 図２
BOARD HOLDING MEMBER
基板保持部材
KITABAYASHI TETSUO (author) / SHIMOJIMA HIROMASA (author)
2023-12-13
Patent
Electronic Resource
Japanese
MOLD HOLDING MEMBER AND MANUFACTURING METHOD FOR MOLD HOLDING MEMBER
| European Patent Office | 2016