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A platform for research: civil engineering, architecture and urbanism
COMPOSITE SINTERED BODY, SPUTTERING TARGET, AND METHOD OF MANUFACTURING COMPOSITE SINTERED BODY
To provide a composite sintered body that contains carbon and silicon carbide and is suitable for a sputtering target, a sputtering target that is capable of forming a dense film having a high carbon content, and a method of manufacturing a composite sintered body that enables easy manufacture of a composite sintered body that contains carbon and silicon carbide and is suitable for a sputtering target.SOLUTION: A composite sintered body contains a sintered body of silicon carbide, and carbon atoms excessively contained in the sintered body. The composite sintered body has a carbon content of 60 mass% or greater relative to the total amount of the composite sintered body, and a relative density of 95% or greater relative to the theoretical density of the composite sintered body.SELECTED DRAWING: None
【課題】炭素と炭化ケイ素とを含み、スパッタリングターゲットとして適した複合焼結体を提供する。また、炭素含有率が高く緻密な膜を成膜可能なスパッタリングターゲットを提供する。また、炭素と炭化ケイ素とを含み、スパッタリングターゲットとして適した複合焼結体を容易に製造可能とする複合焼結体の製造方法を提供する。【解決手段】炭化ケイ素の焼結体と、焼結体にさらに過剰に含まれた炭素原子とを含む複合焼結体であって、複合焼結体全量に対する炭素含有率が６０質量％以上であり、複合焼結体の理論密度に対する相対密度が９５％以上である複合焼結体。【選択図】なし
COMPOSITE SINTERED BODY, SPUTTERING TARGET, AND METHOD OF MANUFACTURING COMPOSITE SINTERED BODY
To provide a composite sintered body that contains carbon and silicon carbide and is suitable for a sputtering target, a sputtering target that is capable of forming a dense film having a high carbon content, and a method of manufacturing a composite sintered body that enables easy manufacture of a composite sintered body that contains carbon and silicon carbide and is suitable for a sputtering target.SOLUTION: A composite sintered body contains a sintered body of silicon carbide, and carbon atoms excessively contained in the sintered body. The composite sintered body has a carbon content of 60 mass% or greater relative to the total amount of the composite sintered body, and a relative density of 95% or greater relative to the theoretical density of the composite sintered body.SELECTED DRAWING: None
【課題】炭素と炭化ケイ素とを含み、スパッタリングターゲットとして適した複合焼結体を提供する。また、炭素含有率が高く緻密な膜を成膜可能なスパッタリングターゲットを提供する。また、炭素と炭化ケイ素とを含み、スパッタリングターゲットとして適した複合焼結体を容易に製造可能とする複合焼結体の製造方法を提供する。【解決手段】炭化ケイ素の焼結体と、焼結体にさらに過剰に含まれた炭素原子とを含む複合焼結体であって、複合焼結体全量に対する炭素含有率が６０質量％以上であり、複合焼結体の理論密度に対する相対密度が９５％以上である複合焼結体。【選択図】なし
COMPOSITE SINTERED BODY, SPUTTERING TARGET, AND METHOD OF MANUFACTURING COMPOSITE SINTERED BODY
複合焼結体、スパッタリングターゲットおよび複合焼結体の製造方法
OTOMO MEGUMI (author) / NAGATOMO DAIRO (author)
2019-09-19
Patent
Electronic Resource
Japanese
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