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TABLET FOR VAPOR DEPOSITION, OXIDE TRANSPARENT CONDUCTIVE FILM, AND METHOD OF MANUFACTURING TIN OXIDE-BASED SINTERED BODY
To provide an oxide transparent conductive film provided on a reverse surface side of a hetero-junction type solar cell, a tablet for vapor deposition serving as a vapor deposition source for forming the transparent conductive film, and a method of manufacturing a tin oxide-based sintered body constituting the tablet.SOLUTION: A tablet for vapor deposition is composed of a tin oxide-based sintered body which consists principally of tin oxide and contains 0.5-10 mass% of zinc oxide, 0.1-0.5 mass% of germanium oxide, and 0.1-1.0 mass% of tantalum oxide, and also has a density of 3.75-4.40 g/cm3. The oxide transparent conductive film consists principally of tin oxide, contains 0.5-10 mass% of zinc oxide, 0.1-0.5 mass% of germanium oxide, and 0.1-1.0 mass% of tantalum oxide, and has a light transmissivity of 90% or larger at a wavelength of 450-800 nm with a film thickness of 100 nm.SELECTED DRAWING: Figure 1
【課題】ヘテロ接合型太陽電池の裏面側に設けられる酸化物透明導電膜、この透明導電膜を形成する際の蒸着源となる蒸着用タブレットおよびこのタブレットを構成する酸化錫系焼結体の製造方法を提供する。【解決手段】蒸着用タブレットは、酸化錫を主成分とし、酸化亜鉛を0.5質量％以上10質量％以下、酸化ゲルマニウムを0.1質量％以上0.5質量％以下、酸化タンタルを0.1質量％以上1.0質量％以下含有し、密度が3.75ｇ／ｃｍ3以上4.40ｇ/ｃｍ3以下である酸化錫系焼結体により構成されることを特徴とし、酸化物透明導電膜は、酸化錫を主成分とし、酸化亜鉛を0.5質量％以上10質量％以下、酸化ゲルマニウムを0.1質量％以上0.5質量％以下、酸化タンタルを0.1質量％以上1.0質量％以下含有し、膜厚100ｎｍにおける波長450〜800ｎｍの光透過率が90％以上であることを特徴とする。【選択図】図１
TABLET FOR VAPOR DEPOSITION, OXIDE TRANSPARENT CONDUCTIVE FILM, AND METHOD OF MANUFACTURING TIN OXIDE-BASED SINTERED BODY
To provide an oxide transparent conductive film provided on a reverse surface side of a hetero-junction type solar cell, a tablet for vapor deposition serving as a vapor deposition source for forming the transparent conductive film, and a method of manufacturing a tin oxide-based sintered body constituting the tablet.SOLUTION: A tablet for vapor deposition is composed of a tin oxide-based sintered body which consists principally of tin oxide and contains 0.5-10 mass% of zinc oxide, 0.1-0.5 mass% of germanium oxide, and 0.1-1.0 mass% of tantalum oxide, and also has a density of 3.75-4.40 g/cm3. The oxide transparent conductive film consists principally of tin oxide, contains 0.5-10 mass% of zinc oxide, 0.1-0.5 mass% of germanium oxide, and 0.1-1.0 mass% of tantalum oxide, and has a light transmissivity of 90% or larger at a wavelength of 450-800 nm with a film thickness of 100 nm.SELECTED DRAWING: Figure 1
【課題】ヘテロ接合型太陽電池の裏面側に設けられる酸化物透明導電膜、この透明導電膜を形成する際の蒸着源となる蒸着用タブレットおよびこのタブレットを構成する酸化錫系焼結体の製造方法を提供する。【解決手段】蒸着用タブレットは、酸化錫を主成分とし、酸化亜鉛を0.5質量％以上10質量％以下、酸化ゲルマニウムを0.1質量％以上0.5質量％以下、酸化タンタルを0.1質量％以上1.0質量％以下含有し、密度が3.75ｇ／ｃｍ3以上4.40ｇ/ｃｍ3以下である酸化錫系焼結体により構成されることを特徴とし、酸化物透明導電膜は、酸化錫を主成分とし、酸化亜鉛を0.5質量％以上10質量％以下、酸化ゲルマニウムを0.1質量％以上0.5質量％以下、酸化タンタルを0.1質量％以上1.0質量％以下含有し、膜厚100ｎｍにおける波長450〜800ｎｍの光透過率が90％以上であることを特徴とする。【選択図】図１
TABLET FOR VAPOR DEPOSITION, OXIDE TRANSPARENT CONDUCTIVE FILM, AND METHOD OF MANUFACTURING TIN OXIDE-BASED SINTERED BODY
蒸着用タブレットと酸化物透明導電膜および酸化錫系焼結体の製造方法
KUWAHARA MASAKAZU (author)
2021-02-18
Patent
Electronic Resource
Japanese
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