A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
To provide a piezoelectric element that can miniaturize the grain size of a piezoelectric layer.SOLUTION: A piezoelectric element of the present invention is a piezoelectric element comprising: a substrate that includes aluminum oxide and/or tantalum oxide; a first electrode that is deposited on the substrate; a piezoelectric layer that is deposited on the first electrode and has a complex oxide including potassium, sodium, and niobium; and a second electrode that is deposited on the piezoelectric layer. The piezoelectric layer is provided to cover the first electrode. The piezoelectric layer includes aluminum oxide and/or tantalum oxide.SELECTED DRAWING: Figure 1
【課題】圧電体層の結晶粒径を微細化することができる圧電素子を提供する。【解決手段】本発明の圧電素子は、酸化アルミニウムおよび／または酸化タンタルを含む基体と、基体上に成膜された第１電極と、第１電極上に成膜され、カリウムとナトリウムとニオブとを含む複合酸化物を有する圧電体層と、圧電体層上に成膜された第２電極と、を備えた圧電素子であって、圧電体層は第１電極を覆うように設けられており、圧電体層は酸化アルミニウムおよび／または酸化タンタルを含む。【選択図】図１
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
To provide a piezoelectric element that can miniaturize the grain size of a piezoelectric layer.SOLUTION: A piezoelectric element of the present invention is a piezoelectric element comprising: a substrate that includes aluminum oxide and/or tantalum oxide; a first electrode that is deposited on the substrate; a piezoelectric layer that is deposited on the first electrode and has a complex oxide including potassium, sodium, and niobium; and a second electrode that is deposited on the piezoelectric layer. The piezoelectric layer is provided to cover the first electrode. The piezoelectric layer includes aluminum oxide and/or tantalum oxide.SELECTED DRAWING: Figure 1
【課題】圧電体層の結晶粒径を微細化することができる圧電素子を提供する。【解決手段】本発明の圧電素子は、酸化アルミニウムおよび／または酸化タンタルを含む基体と、基体上に成膜された第１電極と、第１電極上に成膜され、カリウムとナトリウムとニオブとを含む複合酸化物を有する圧電体層と、圧電体層上に成膜された第２電極と、を備えた圧電素子であって、圧電体層は第１電極を覆うように設けられており、圧電体層は酸化アルミニウムおよび／または酸化タンタルを含む。【選択図】図１
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
圧電素子および圧電素子応用デバイス
HORIBA YASUHISA (author) / ITAYAMA YASUHIRO (author) / TAKEUCHI MASAHIRO (author)
2024-04-02
Patent
Electronic Resource
Japanese
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