PALLADIUM COBALT OXIDE TARGET, DELAFOSSITE-TYPE OXIDE TARGET, AND METHOD FOR PRODUCING PALLADIUM COBALT OXIDE TARGET: Fid-Bau Portal

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PALLADIUM COBALT OXIDE TARGET, DELAFOSSITE-TYPE OXIDE TARGET, AND METHOD FOR PRODUCING PALLADIUM COBALT OXIDE TARGET

MASAHIRO YASUSHI / NUMAZAKI TAKESHI

To provide a palladium cobalt oxide target, a delafossite-type oxide target, and a method for producing the palladium cobalt oxide target.SOLUTION: A palladium cobalt oxide target has a denseness calculated based on the density of palladium cobalt oxide (PdCoO2) of 60% or more and 80% or less, and a concentration of palladium cobalt oxide on a surface of 90.0 mass% or more and 99.5 mass% or less.SELECTED DRAWING: None

【課題】パラジウムコバルト酸化物ターゲット、デラフォサイト型酸化物ターゲット及びパラジウムコバルト酸化物ターゲットの製造方法を提供する。【解決手段】パラジウムコバルト酸化物ターゲットは、パラジウムコバルト酸化物（ＰｄＣｏＯ２）の密度に基づいて算出した緻密度が６０％以上８０％以下で、表面のパラジウムコバルト酸化物の濃度が９０.０質量％以上９９．５質量％以下である。【選択図】無し

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PALLADIUM COBALT OXIDE TARGET, DELAFOSSITE-TYPE OXIDE TARGET, AND METHOD FOR PRODUCING PALLADIUM COBALT OXIDE TARGET

MASAHIRO YASUSHI / NUMAZAKI TAKESHI

To provide a palladium cobalt oxide target, a delafossite-type oxide target, and a method for producing the palladium cobalt oxide target.SOLUTION: A palladium cobalt oxide target has a denseness calculated based on the density of palladium cobalt oxide (PdCoO2) of 60% or more and 80% or less, and a concentration of palladium cobalt oxide on a surface of 90.0 mass% or more and 99.5 mass% or less.SELECTED DRAWING: None

【課題】パラジウムコバルト酸化物ターゲット、デラフォサイト型酸化物ターゲット及びパラジウムコバルト酸化物ターゲットの製造方法を提供する。【解決手段】パラジウムコバルト酸化物ターゲットは、パラジウムコバルト酸化物（ＰｄＣｏＯ２）の密度に基づいて算出した緻密度が６０％以上８０％以下で、表面のパラジウムコバルト酸化物の濃度が９０.０質量％以上９９．５質量％以下である。【選択図】無し

PALLADIUM COBALT OXIDE TARGET, DELAFOSSITE-TYPE OXIDE TARGET, AND METHOD FOR PRODUCING PALLADIUM COBALT OXIDE TARGET

MASAHIRO YASUSHI / NUMAZAKI TAKESHI

To provide a palladium cobalt oxide target, a delafossite-type oxide target, and a method for producing the palladium cobalt oxide target.SOLUTION: A palladium cobalt oxide target has a denseness calculated based on the density of palladium cobalt oxide (PdCoO2) of 60% or more and 80% or less, and a concentration of palladium cobalt oxide on a surface of 90.0 mass% or more and 99.5 mass% or less.SELECTED DRAWING: None

【課題】パラジウムコバルト酸化物ターゲット、デラフォサイト型酸化物ターゲット及びパラジウムコバルト酸化物ターゲットの製造方法を提供する。【解決手段】パラジウムコバルト酸化物ターゲットは、パラジウムコバルト酸化物（ＰｄＣｏＯ２）の密度に基づいて算出した緻密度が６０％以上８０％以下で、表面のパラジウムコバルト酸化物の濃度が９０.０質量％以上９９．５質量％以下である。【選択図】無し

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Title:

PALLADIUM COBALT OXIDE TARGET, DELAFOSSITE-TYPE OXIDE TARGET, AND METHOD FOR PRODUCING PALLADIUM COBALT OXIDE TARGET

Additional title:

パラジウムコバルト酸化物ターゲット、デラフォサイト型酸化物ターゲット及びパラジウムコバルト酸化物ターゲットの製造方法

Contributors:

MASAHIRO YASUSHI (author) / NUMAZAKI TAKESHI (author)

Publication date:

2024-01-23

Type of media:

Patent

Type of material:

Electronic Resource

Language:

Japanese

Classification:

IPC: C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL

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