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APPARATUS FOR FORMING SILICON CARBIDE

Abstract

실시예에 따른 실리콘 카바이드 제조장치는, 실리콘 소스 및 카본 소스를 포함하는 원료를 수용하는 도가니; 및 상기 원료 내에 배치되는 가스 배출부를 포함한다.

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APPARATUS FOR FORMING SILICON CARBIDE

Abstract

APPARATUS FOR FORMING SILICON CARBIDE

Abstract

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Document information

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Document information

Title:

APPARATUS FOR FORMING SILICON CARBIDE

Additional title:

실리콘 카바이드 제조장치

Publication date:

2018-08-30

Type of media:

Patent

Type of material:

Electronic Resource

Language:

Korean

Classification:

IPC: C04B Kalk , LIME / C30B SINGLE-CRYSTAL GROWTH , Züchten von Einkristallen

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