A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PROCESSING CHAMBER AND SUBSTRATE PROCESSING APPARATUS
The present invention relates to, for example, a processing chamber having a cover body which can be opened and closed installed at an upper part to improve maintainability as a device suitable for automatically opening and closing the cover body. The processing chamber (10) of the present invention which accommodates a substrate to be processed in an internal space and performs a predetermined process comprises: a chamber main body (11); a cover portion (12) having a cover body which covers and blocks a chamber opening from an upper direction; a hinge portion (13) swingably coupling the cover portion to the chamber main body around a roughly horizontal swing axis; and an opening and closing portion (30) swinging the cover portion around the swing axis to switch between a closed state in which the cover body covers the opening and an open state in which the cover body opens the opening. The opening and closing portion has a movable member (34) and a driving device (32). The movable member is installed at a position ahead of an abutting portion in a path in which the abutting portion is displaced when the cover body moves from the open state to the closed state to be capable of being spaced apart/abutted to the abutting portion. The driving device changes the opening of the cover portion by changing a position at which the movable member abuts the abutting portion. Accordingly, a device suitable for automatically opening and closing the cover body may be provided.
본 발명은, 예를 들면 메인터넌스성 향상을 위해서 상부에 개폐 가능한 덮개체가 설치되는 처리 챔버에 대해서, 덮개체의 자동 개폐에 적합한 기구이다. 내부 공간에 피처리 기판을 수용하여 소정의 처리를 실시하는 본 발명의 처리 챔버(10)는, 챔버 본체(11)와, 챔버 개구를 상방으로부터 덮어 폐색하는 덮개체를 갖는 덮개부(12)와, 챔버 본체에 대해서, 덮개부를 대략 수평인 요동축 둘레로 요동 가능하게 결합하는 힌지부(13)와, 덮개부를 요동축 둘레로 요동시켜, 덮개체가 개구를 덮는 닫힘 상태와 덮개체가 개구를 개방하는 열림 상태를 전환하는 개폐부(30)를 구비한다. 개폐부는 가동 부재(34)와 구동 기구(32)를 갖고, 가동 부재는, 덮개체가 열림 상태로부터 닫힘 상태로 향할 때에 맞닿음 부위가 변위하는 경로 상에서 맞닿음 부위보다 전방의 위치에, 맞닿음 부위에 대해서 이격/맞닿음 가능하게 설치된다. 구동 기구는, 가동 부재가 맞닿음 부위에 맞닿는 위치를 변화시킴으로써 덮개부의 열림을 변화시킨다.
PROCESSING CHAMBER AND SUBSTRATE PROCESSING APPARATUS
The present invention relates to, for example, a processing chamber having a cover body which can be opened and closed installed at an upper part to improve maintainability as a device suitable for automatically opening and closing the cover body. The processing chamber (10) of the present invention which accommodates a substrate to be processed in an internal space and performs a predetermined process comprises: a chamber main body (11); a cover portion (12) having a cover body which covers and blocks a chamber opening from an upper direction; a hinge portion (13) swingably coupling the cover portion to the chamber main body around a roughly horizontal swing axis; and an opening and closing portion (30) swinging the cover portion around the swing axis to switch between a closed state in which the cover body covers the opening and an open state in which the cover body opens the opening. The opening and closing portion has a movable member (34) and a driving device (32). The movable member is installed at a position ahead of an abutting portion in a path in which the abutting portion is displaced when the cover body moves from the open state to the closed state to be capable of being spaced apart/abutted to the abutting portion. The driving device changes the opening of the cover portion by changing a position at which the movable member abuts the abutting portion. Accordingly, a device suitable for automatically opening and closing the cover body may be provided.
본 발명은, 예를 들면 메인터넌스성 향상을 위해서 상부에 개폐 가능한 덮개체가 설치되는 처리 챔버에 대해서, 덮개체의 자동 개폐에 적합한 기구이다. 내부 공간에 피처리 기판을 수용하여 소정의 처리를 실시하는 본 발명의 처리 챔버(10)는, 챔버 본체(11)와, 챔버 개구를 상방으로부터 덮어 폐색하는 덮개체를 갖는 덮개부(12)와, 챔버 본체에 대해서, 덮개부를 대략 수평인 요동축 둘레로 요동 가능하게 결합하는 힌지부(13)와, 덮개부를 요동축 둘레로 요동시켜, 덮개체가 개구를 덮는 닫힘 상태와 덮개체가 개구를 개방하는 열림 상태를 전환하는 개폐부(30)를 구비한다. 개폐부는 가동 부재(34)와 구동 기구(32)를 갖고, 가동 부재는, 덮개체가 열림 상태로부터 닫힘 상태로 향할 때에 맞닿음 부위가 변위하는 경로 상에서 맞닿음 부위보다 전방의 위치에, 맞닿음 부위에 대해서 이격/맞닿음 가능하게 설치된다. 구동 기구는, 가동 부재가 맞닿음 부위에 맞닿는 위치를 변화시킴으로써 덮개부의 열림을 변화시킨다.
PROCESSING CHAMBER AND SUBSTRATE PROCESSING APPARATUS
처리 챔버 및 기판 처리 장치
NAKANE SHINGO (author)
2023-08-01
Patent
Electronic Resource
Korean
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