A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Polycrystalline SiC substrate and method for manufacturing same
A support substrate 2 is a polycrystalline SiC substrate formed of polycrystalline SiC. Assuming that one of the two sides of the polycrystalline SiC substrate is a first side and that the other side is a second side, a substrate grain size change rate of the polycrystalline SiC substrate, which is a value obtained by dividing a difference between the average value of crystal grain sizes of the polycrystalline SiC on the first side and the average value of crystal grain sizes of the polycrystalline SiC on the second side by a thickness of the polycrystalline SiC substrate, is 0.43% or less. A radius of curvature of the polycrystalline SiC substrate is 142 m or more.
Polycrystalline SiC substrate and method for manufacturing same
A support substrate 2 is a polycrystalline SiC substrate formed of polycrystalline SiC. Assuming that one of the two sides of the polycrystalline SiC substrate is a first side and that the other side is a second side, a substrate grain size change rate of the polycrystalline SiC substrate, which is a value obtained by dividing a difference between the average value of crystal grain sizes of the polycrystalline SiC on the first side and the average value of crystal grain sizes of the polycrystalline SiC on the second side by a thickness of the polycrystalline SiC substrate, is 0.43% or less. A radius of curvature of the polycrystalline SiC substrate is 142 m or more.
Polycrystalline SiC substrate and method for manufacturing same
YAGI KUNIAKI (author) / KOBAYASHI MOTOKI (author)
2021-03-02
Patent
Electronic Resource
English
POLYCRYSTALLINE SILICON CARBIDE SUBSTRATE WITH DENSITY GRADIENT AND METHOD OF MANUFACTURING THE SAME
| European Patent Office | 2024
POLYCRYSTALLINE SILICON CARBIDE SUBSTRATE AND METHOD FOR PRODUCING THE SAME
| European Patent Office | 2020
| European Patent Office | 2019
| European Patent Office | 2017
POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
| European Patent Office | 2024