A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Target material for deposition of molybdenum oxide layers
An electrically conductive, oxidic target material includes a proportion of substoichiometric molybdenum oxide phases of at least 60% by volume, an MoO2 phase in a proportion of 2-20% by volume, and optionally an MoO3 phase in a proportion of 0-20% by volume. The substoichiometric molybdenum oxide phase proportion is formed by one or more substoichiometric MoO3-y phase(s), where y is in each case in a range from 0.05 to 0.25. A process for producing the target material and a process for using the target material are also provided.
Target material for deposition of molybdenum oxide layers
An electrically conductive, oxidic target material includes a proportion of substoichiometric molybdenum oxide phases of at least 60% by volume, an MoO2 phase in a proportion of 2-20% by volume, and optionally an MoO3 phase in a proportion of 0-20% by volume. The substoichiometric molybdenum oxide phase proportion is formed by one or more substoichiometric MoO3-y phase(s), where y is in each case in a range from 0.05 to 0.25. A process for producing the target material and a process for using the target material are also provided.
Target material for deposition of molybdenum oxide layers
FRANZKE ENRICO (author) / KOESTENBAUER HARALD (author) / WINKLER JOERG (author) / LORENZ DOMINIK (author) / LEITER THOMAS (author)
2024-01-02
Patent
Electronic Resource
English
TARGET MATERIAL FOR DEPOSITION OF MOLYBDENUM OXIDE LAYERS
| European Patent Office | 2020
| European Patent Office | 2022
MOLYBDENUM OXIDE SPUTTERING TARGET AND MOLYBDENUM OXIDE SPUTTERING TARGET PRODUCTION METHOD
| European Patent Office | 2022
Preparation method of molybdenum tantalum oxide target material
| European Patent Office | 2024