A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
AIR-PERMEABLE MEMBER, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, PLUG, AND ADSORPTION MEMBER
An air-permeable member of the present disclosure includes a porous ceramic having a columnar or plate shape. A root mean square slope RΔq in a roughness curve of an outer peripheral surface of the porous ceramic is greater than a root mean square slope RΔq in a roughness curve of a main surface of the porous ceramic.
AIR-PERMEABLE MEMBER, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, PLUG, AND ADSORPTION MEMBER
An air-permeable member of the present disclosure includes a porous ceramic having a columnar or plate shape. A root mean square slope RΔq in a roughness curve of an outer peripheral surface of the porous ceramic is greater than a root mean square slope RΔq in a roughness curve of a main surface of the porous ceramic.
AIR-PERMEABLE MEMBER, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, PLUG, AND ADSORPTION MEMBER
MATSUFUJI HIROMASA (author)
2023-05-18
Patent
Electronic Resource
English
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