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    WAFER SUPPORT

    New search for: YAMAGISHI WATARU
    New search for: MORI KAZUMASA
    New search for: KOUNO HITOSHI
    New search for: ETO SHUNICHI

    A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.

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    WAFER SUPPORT

    New search for: YAMAGISHI WATARU
    New search for: MORI KAZUMASA
    New search for: KOUNO HITOSHI
    New search for: ETO SHUNICHI

    A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.

    Access

    Download

    WAFER SUPPORT

    New search for: YAMAGISHI WATARU
    New search for: MORI KAZUMASA
    New search for: KOUNO HITOSHI
    New search for: ETO SHUNICHI

    A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.

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    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    WAFER SUPPORT

    Contributors:

    YAMAGISHI WATARU (author) / MORI KAZUMASA (author) / KOUNO HITOSHI (author) / ETO SHUNICHI (author)

    Publication date:

    2024-05-30

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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