Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. et al. | British Library Online Contents | 2006

Selective epitaxial growth of strained SiGe/Si for optoelectronic devices

Vescan, L. / Stoica, T. / Goryll, M. et al. | British Library Online Contents | 1998

Epitaxial growth of SiGe layers for BiCMOS applications

Regolini, J. L. / Pejnefors, J. / Baffert, T. et al. | British Library Online Contents | 1998

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

Loo, R. / Collaert, N. / Verheyen, P. et al. | British Library Online Contents | 2004

A 70-GHz-fT double-polysilicon SiGe HBT using a non selective epitaxial growth

Baudry, H. / Fellous, C. / Martinet, B. et al. | British Library Online Contents | 2002