Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. et al. | British Library Online Contents | 2006

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

Loo, R. / Collaert, N. / Verheyen, P. et al. | British Library Online Contents | 2004

Selective epitaxial growth of SiGe alloys - influence of growth parameters on film properties

Vescan, L. | British Library Online Contents | 1994

Numerical simulation of strained Si/SiGe devices: the hierarchical approach

Meinerzhagen, B. / Jungemann, C. / Neinhus, B. et al. | British Library Online Contents | 2004

Simultaneous optical measurement of Ge-content and carbon doping in strained epitaxial SiGe films

Morris, S. / Le Cunff, D. / Ristoiu, D. et al. | British Library Online Contents | 2006