Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor

Chiu, C. C. / Desu, S. B. / Chen, Z. J. et al. | British Library Online Contents | 1994

Low pressure chemical vapor deposition (LPCVD) of -SiC on Si(100) using MTS in a hot wall reactor

Chiu, C. C. / Desu, S. B. / Ching Yi Tsai | British Library Online Contents | 1993

Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor

Veneroni, A. / Omarini, F. / Masi, M. et al. | British Library Online Contents | 2005

LPCVD Growth and Structural Properties of 4H-SiC Epitaxial Layers

Tsuchida, H. / Kamata, I. / Jikimoto, T. et al. | British Library Online Contents | 2000

Distribution of Paramagnetic Defects in 3C-SiC Epitaxial Films Grown by LPCVD Method with Alternate Gas Supply

Izumi, T. / Kobayashi, K. / Hirosawa, E. et al. | British Library Online Contents | 1998