Development of Vertical 3''x2'' LPCVD System for Fast Epitaxial Growth on 4H-SiC

Zhao, W.S. / Sun, G.S. / Wu, H.L. et al. | British Library Online Contents | 2012

Growth rate modeling for selective tungsten LPCVD

Wolf, H. / Streiter, R. / Schulz, S. E. et al. | British Library Online Contents | 1996

Structural properties of epitaxial silicide layers on Si

Von Kaenel, H. / Mueller, E. / Goncalves-Conto, S. et al. | British Library Online Contents | 1996

Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers

Bakin, A. / Behrens, I. / Ivanov, A. et al. | British Library Online Contents | 2002

Growth of Titanium Dioxide Thin Films by LPCVD

Li, W.-y. / Li, G. / Cai, X. et al. | British Library Online Contents | 2003