Doping and microwave power effects on the properties of a-SiC:H and c-SiC:H films prepared using ECR-CVD

Yoon, S. F. / Ji, R. / Ahn, J. | British Library Online Contents | 1996

Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Rusakov, G. V. / Ivashchenko, L. A. / Ivashchenko, V. I. et al. | British Library Online Contents | 2001

Gas and heat treatment effects on the defect structure of a-SiC:H films

Friessnegg, T. / Boudreau, M. / Mascher, P. et al. | British Library Online Contents | 1997

The Study of High Temperature Annealing of a-SiC:H Films

Zhang, S. / Hu, Z. / Raniero, L. et al. | British Library Online Contents | 2006

Plausible interpretation of optical absorption spectra of a-SiC:H thin films

Ivashchenko, V. I. / Rusakov, G. V. / Shevchenko, V. I. et al. | British Library Online Contents | 2001