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Simultaneous optical measurement of Ge-content and carbon doping in strained epitaxial SiGe films
Simultaneous optical measurement of Ge-content and carbon doping in strained epitaxial SiGe films
Simultaneous optical measurement of Ge-content and carbon doping in strained epitaxial SiGe films
Morris, S. (Autor:in) / Le Cunff, D. (Autor:in) / Ristoiu, D. (Autor:in) / Vachellerie, V. (Autor:in) / Deleglise, F. (Autor:in) / Dutartre, D. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 167-172
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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