LPCVD Growth and Structural Properties of 4H-SiC Epitaxial Layers

Tsuchida, H. / Kamata, I. / Jikimoto, T. et al. | British Library Online Contents | 2000

Growth rate modeling for selective tungsten LPCVD

Wolf, H. / Streiter, R. / Schulz, S. E. et al. | British Library Online Contents | 1996

Low temperature Si epitaxy in a vertical LPCVD batch reactor

Ritter, G. / Harrington, J. / Tillack, B. et al. | British Library Online Contents | 2000

Growth of Titanium Dioxide Thin Films by LPCVD

Li, W.-y. / Li, G. / Cai, X. et al. | British Library Online Contents | 2003

Growth and Characterization of Ge on GaN by LPCVD

Xie, Z.-l. / Han, P. / Zhang, R. et al. | British Library Online Contents | 2011