SiC Epitaxial Layer Growth in a 6x150 mm Warm-Wall Planetary Reactor

Burk, A.A. / Tsvetkov, D. / Barnhardt, D. et al. | British Library Online Contents | 2012

Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor

Burk, A. A. / O Loughlin, M. J. / Paisley, M. J. et al. | British Library Online Contents | 2005

10 x 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor

Dong, L. / Sun, G.S. / Yu, J. et al. | British Library Online Contents | 2013

Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes

Melnychuk, G. / Koshka, Y. / Yingquan, S. et al. | British Library Online Contents | 2003

Simulation of High-Temperature SiC Epitaxial Growth Using Vertical, Quasi-Hot-Wall CVD Reactor

Hasegawa, M. / Miyauchi, A. / Masahara, K. et al. | British Library Online Contents | 2002