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Characterization of interfacial reactions between ionized metal plasma deposited Al-0.5 wt.% Cu and Ti on SiO2
Characterization of interfacial reactions between ionized metal plasma deposited Al-0.5 wt.% Cu and Ti on SiO2
Characterization of interfacial reactions between ionized metal plasma deposited Al-0.5 wt.% Cu and Ti on SiO2
Lee, Y. K. (Autor:in) / Maung Latt, K. (Autor:in) / Li, S. (Autor:in) / Osipowicz, T. (Autor:in) / Chiam, S. Y. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 77 ; 101 - 105
01.01.2000
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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Behaviour of ionized metal plasma deposited Ta diffusion barrier between Cu and SiO2
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