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Characterization of 2 Inch SiC Wafers Made by the Sublimation Method
Characterization of 2 Inch SiC Wafers Made by the Sublimation Method
Characterization of 2 Inch SiC Wafers Made by the Sublimation Method
Sasaki, M. (Autor:in) / Shiomi, H. (Autor:in) / Nishino, S. (Autor:in)
MATERIALS SCIENCE FORUM ; 353/356 ; 267-270
01.01.2001
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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