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Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Murata, K. (Autor:in) / Fujioka, N. (Autor:in) / Chinone, Y. (Autor:in) / Nishino, S. (Autor:in) / Bergman, P. / Janzen, E.
01.01.2003
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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