Two-dimensional interstitial diffusion in silicon monitored by scanning capacitance microscopy

Giannazzo, F. / Mirabella, S. / Raineri, V. et al. | British Library Online Contents | 2003

Two-Dimensional Dopant Profiling by Scanning Capacitance Microscopy

Williams, C. C. | British Library Online Contents | 1999

Two-dimensional dopant profiling by scanning capacitance force microscopy

Kimura, K. / Kobayashi, K. / Yamada, H. et al. | British Library Online Contents | 2003

Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors

Kopanski, J. J. / Marchiando, J. F. / Lowney, J. R. | British Library Online Contents | 1997

Scanning capacitance microscopy investigations of SiC structures

Bowallius, O. / Anand, S. / Nordell, N. et al. | British Library Online Contents | 2001