Optical characterization of laser processed ultra-shallow junctions

Kerrien, G. / Hernandez, M. / Laviron, C. et al. | British Library Online Contents | 2003

Advanced activation of ultra-shallow junctions using flash-assisted RTP

Lerch, W. / Paul, S. / Niess, J. et al. | British Library Online Contents | 2005

Differential Hall profiling of ultra-shallow junctions in Si and SOI

Bennett, N. S. / Smith, A. J. / Colombeau, B. et al. | British Library Online Contents | 2005

Thermal stability of boron electrical activation in preamorphised ultra-shallow junctions

Cristiano, F. / Cherkashin, N. / Calvo, P. et al. | British Library Online Contents | 2004

Ultra-shallow junctions produced by plasma doping and flash lamp annealing

Skorupa, W. / Yankov, R. A. / Anwand, W. et al. | British Library Online Contents | 2004