Damage Evolution in Al-implanted 4H SiC

Hallen, A. / Persson, P. O. A. / Kuznetsov, A. Y. et al. | British Library Online Contents | 2000

Damage formation and recovery in temperature helium implanted 4H-SiC

Oliviero, E. / Tromas, C. / Pailloux, F. et al. | British Library Online Contents | 2003

Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC

Sands, D. / Key, P. H. / Schlaf, M. et al. | British Library Online Contents | 2000

Damage Reduction in Channeled Ion Implanted 6H-SiC

Morvan, E. / Mestres, N. / Campos, F. J. et al. | British Library Online Contents | 2000

Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration

Chang, Feng-Ming / Wu, Zong-Zhe / Lin, Yen-Fu et al. | British Library Online Contents | 2018