TOF-SIMS depth profiling of SIMON

Xin, G. / Dong, G. / Xu, C. et al. | British Library Online Contents | 2003

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

SIMS depth profiling and TEM imaging of the SIMS altered layer

Christofi, A. / Walker, J. F. / McPhail, D. S. | British Library Online Contents | 2008

SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. et al. | British Library Online Contents | 2003