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Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC
Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC
Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC
Meziere, J. (Autor:in) / Pons, M. (Autor:in) / Dedulle, J.-M. (Autor:in) / Blanquet, E. (Autor:in) / Ferret, P. (Autor:in) / Di Cioccio, L. (Autor:in) / Billon, T. (Autor:in) / Bergman, P. / Janzen, E.
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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