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    Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC

    New search for: Meziere, J.
    New search for: Pons, M.
    New search for: Dedulle, J.-M.
    New search for: Blanquet, E.
    New search for: Ferret, P.
    New search for: Di Cioccio, L.
    New search for: Billon, T.
    New search for: Bergman, P.
    New search for: Janzen, E.

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    Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC

    New search for: Meziere, J.
    New search for: Pons, M.
    New search for: Dedulle, J.-M.
    New search for: Blanquet, E.
    New search for: Ferret, P.
    New search for: Di Cioccio, L.
    New search for: Billon, T.
    New search for: Bergman, P.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC

    New search for: Meziere, J.
    New search for: Pons, M.
    New search for: Dedulle, J.-M.
    New search for: Blanquet, E.
    New search for: Ferret, P.
    New search for: Di Cioccio, L.
    New search for: Billon, T.
    New search for: Bergman, P.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC

    Contributors:

    Meziere, J. (author) / Pons, M. (author) / Dedulle, J.-M. (author) / Blanquet, E. (author) / Ferret, P. (author) / Di Cioccio, L. (author) / Billon, T. (author) / Bergman, P. / Janzen, E.

    Published in:

    Silicon Carbide and Related Materials 2002 ; 141-144

    MATERIALS SCIENCE FORUM ; 433/436

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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