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Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Murata, K. (author) / Fujioka, N. (author) / Chinone, Y. (author) / Nishino, S. (author) / Bergman, P. / Janzen, E.
2003-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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