Kinetics of epitaxial growth of Si and SiGe films on (110) Si substrates

Sugiyama, N. / Moriyama, Y. / Nakaharai, S. et al. | British Library Online Contents | 2004

Epitaxial growth of SiGe layers for BiCMOS applications

Regolini, J. L. / Pejnefors, J. / Baffert, T. et al. | British Library Online Contents | 1998

Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. et al. | British Library Online Contents | 2006

Selective epitaxial growth of strained SiGe/Si for optoelectronic devices

Vescan, L. / Stoica, T. / Goryll, M. et al. | British Library Online Contents | 1998

Epitaxial growth of SiGe thin films by ion-beam sputtering

Sasaki, K. / Nakata, K. / Hata, T. | British Library Online Contents | 1997