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Fabrication of 4H-SiC Double-Epitaxial MOSFETs
Fabrication of 4H-SiC Double-Epitaxial MOSFETs
Fabrication of 4H-SiC Double-Epitaxial MOSFETs
Harada, S. (Autor:in) / Okamoto, M. (Autor:in) / Yatsuo, T. (Autor:in) / Adachi, K. (Autor:in) / Suzuki, K. (Autor:in) / Suzuki, S. (Autor:in) / Fukuda, K. (Autor:in) / Arai, K. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 1421-1424
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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