Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. et al. | British Library Online Contents | 2003

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004

Backside-SIMS profiling of dopants in thin Hf silicate film

Hongo, C. / Takenaka, M. / Kamimuta, Y. et al. | British Library Online Contents | 2004

Depth profiles of boron and nitrogen in SiON films by backside SIMS

Sameshima, J. / Maeda, R. / Yamada, K. et al. | British Library Online Contents | 2004