A platform for research: civil engineering, architecture and urbanism
Site-specific SIMS backside analysis
Site-specific SIMS backside analysis
Site-specific SIMS backside analysis
Gu, C. (author) / Garcia, R. (author) / Pivovarov, A. (author) / Stevie, F. (author) / Griffis, D. (author)
APPLIED SURFACE SCIENCE ; 231/232 ; 663-667
2004-01-01
5 pages
Article (Journal)
English
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS
British Library Online Contents | 2003
|SIMS backside depth profiling of ultra shallow implants
British Library Online Contents | 2003
|Accurate depth profiling for ultra-shallow implants using backside-SIMS
British Library Online Contents | 2004
|Backside-SIMS profiling of dopants in thin Hf silicate film
British Library Online Contents | 2004
|Depth profiles of boron and nitrogen in SiON films by backside SIMS
British Library Online Contents | 2004
|