Characterization of high-k gate dielectric films using SIMS

Yamamoto, T. / Morita, N. / Sugiyama, N. et al. | British Library Online Contents | 2003

Characterization of HfO2 dielectric films with low energy SIMS

Jiang, Z. X. / Kim, K. / Lerma, J. et al. | British Library Online Contents | 2006

SIMS analysis of hydrogen diffusion and trapping in CVD polycrystalline diamond

Jomard, F. / Ballutaud, D. | British Library Online Contents | 2003

A study of dynamic SIMS analysis of low-k dielectric materials

Mowat, I. A. / Lin, X. F. / Fister, T. et al. | British Library Online Contents | 2006

SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. et al. | British Library Online Contents | 2003