SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. et al. | British Library Online Contents | 2003

Metal implant standards for surface analysis by TOF-SIMS and dynamic SIMS: comparison with TRIM simulation

Li-Fatou, A. V. / Douglas, M. | British Library Online Contents | 2003

SIMS study of Cu trapping and migration in low-k dielectric films

Li, Y. / Hunter, J. / Tate, T. J. | British Library Online Contents | 2004

Characterization of HfO2 dielectric films with low energy SIMS

Jiang, Z. X. / Kim, K. / Lerma, J. et al. | British Library Online Contents | 2006

Characterization of high-k gate dielectric films using SIMS

Yamamoto, T. / Morita, N. / Sugiyama, N. et al. | British Library Online Contents | 2003