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Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures
Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures
Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures
Oliveira, A. R. (Autor:in) / Pereyra, I. (Autor:in) / Carreno, M. N. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 144-146
01.01.2004
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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