Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures: Fid-Bau Portal

Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures

Oliveira, A. R. / Pereyra, I. / Carreno, M. N.

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Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures

Oliveira, A. R. / Pereyra, I. / Carreno, M. N.

Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures

Oliveira, A. R. / Pereyra, I. / Carreno, M. N.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures

Contributors:

Oliveira, A. R. (author) / Pereyra, I. (author) / Carreno, M. N. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 144-146

Publication date:

2004-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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