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Quality of SiO2 and of SiGe formed by oxidation of Si/Si0.7Ge0.3 heterostructure using atomic oxygen at 400degreeC
Quality of SiO2 and of SiGe formed by oxidation of Si/Si0.7Ge0.3 heterostructure using atomic oxygen at 400degreeC
Quality of SiO2 and of SiGe formed by oxidation of Si/Si0.7Ge0.3 heterostructure using atomic oxygen at 400degreeC
Nohira, H. (Autor:in) / Kuroiwa, T. (Autor:in) / Nakamura, M. (Autor:in) / Hirose, Y. (Autor:in) / Mitsui, J. (Autor:in) / Sakai, W. (Autor:in) / Nakajima, K. (Autor:in) / Suzuki, M. (Autor:in) / Kimura, K. (Autor:in) / Sawano, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 237 ; 134-138
01.01.2004
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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