Computational methods for the simulation of the excimer laser annealing in MOS technology

Magna, A. L. / Alippi, P. / Mannino, G. et al. | British Library Online Contents | 2004

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000

Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. et al. | British Library Online Contents | 2005

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I. | British Library Online Contents | 1993

Excimer laser annealing of shallow As and B doped layers

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. et al. | British Library Online Contents | 2004