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The European answer to the integration issues of excimer laser annealing in MOS technology

Privitera, V. / La Magna, A. / Fortunato, G. / Camalleri, M. / Magri, A. / Simon, F. / Svensson, B. G.

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The European answer to the integration issues of excimer laser annealing in MOS technology

Privitera, V. / La Magna, A. / Fortunato, G. / Camalleri, M. / Magri, A. / Simon, F. / Svensson, B. G.

The European answer to the integration issues of excimer laser annealing in MOS technology

Privitera, V. / La Magna, A. / Fortunato, G. / Camalleri, M. / Magri, A. / Simon, F. / Svensson, B. G.

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Check availability in my library

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Title:

The European answer to the integration issues of excimer laser annealing in MOS technology

Contributors:

Privitera, V. (author) / La Magna, A. (author) / Fortunato, G. (author) / Camalleri, M. (author) / Magri, A. (author) / Simon, F. (author) / Svensson, B. G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 92-99

Publication date:

2004-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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