Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Tachibana, K. et al. | British Library Online Contents | 2011

4H-SiC Planarization Using Catalyst-Referred Etching with Pure Water

Isohashi, A. / Sano, Y. / Sadakuni, S. et al. | British Library Online Contents | 2014

Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching

Sadakuni, S. / Pho, B.V. / Dai, N.X. et al. | British Library Online Contents | 2012

Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching

Yamaguchi, W. / Sadakuni, S. / Isohashi, A. et al. | British Library Online Contents | 2014

High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Pho, B.V. / Sadakuni, S. / Okamoto, T. et al. | British Library Online Contents | 2012