Excimer-laser induced chemical etching of transition metals

O`Driscoll, C. / Winfield, R. / Khalfi, K. et al. | British Library Online Contents | 2000

Excimer-laser patterning of copper in LDE (laser dry etching)

Pfleging, W. / Voerckel, A. / Duddek, H. et al. | British Library Online Contents | 1997

Excimer laser induced chlorine etching of Si patterns for microelectronics

Baumgaertner, H. / Jiang, W. / Eisele, I. | British Library Online Contents | 1996

Technical Note: Excimer laser–induced etching of semiconductors and metals

Peyre, J .–L. / Riviere, D. / Vannier, C. et al. | British Library Online Contents | 1990

High etching rate of GaN films by KrF excimer laser

Chu, C. F. / Lee, C. K. / Yu, C. C. et al. | British Library Online Contents | 2001