Thin SiC-4H Epitaxial Layer Growth by Trichlorosilane (TCS) as Silicon Precursor with Very Abrupt Junctions: Fid-Bau Portal

Thin SiC-4H Epitaxial Layer Growth by Trichlorosilane (TCS) as Silicon Precursor with Very Abrupt Junctions

Condorelli, G. / Mauceri, M. / Pistone, G. / Perdicaro, L.M.S. / Abbondanza, G. / Portuese, F. / Valente, G.L. / Crippa, D. / Giannazzo, F. / La Via, F.

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Thin SiC-4H Epitaxial Layer Growth by Trichlorosilane (TCS) as Silicon Precursor with Very Abrupt Junctions

Condorelli, G. / Mauceri, M. / Pistone, G. / Perdicaro, L.M.S. / Abbondanza, G. / Portuese, F. / Valente, G.L. / Crippa, D. / Giannazzo, F. / La Via, F.

Thin SiC-4H Epitaxial Layer Growth by Trichlorosilane (TCS) as Silicon Precursor with Very Abrupt Junctions

Condorelli, G. / Mauceri, M. / Pistone, G. / Perdicaro, L.M.S. / Abbondanza, G. / Portuese, F. / Valente, G.L. / Crippa, D. / Giannazzo, F. / La Via, F.

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Titel:

Thin SiC-4H Epitaxial Layer Growth by Trichlorosilane (TCS) as Silicon Precursor with Very Abrupt Junctions

Beteiligte:

Condorelli, G. (Autor:in) / Mauceri, M. (Autor:in) / Pistone, G. (Autor:in) / Perdicaro, L.M.S. (Autor:in) / Abbondanza, G. (Autor:in) / Portuese, F. (Autor:in) / Valente, G.L. (Autor:in) / Crippa, D. (Autor:in) / Giannazzo, F. (Autor:in) / La Via, F. (Autor:in)

Erschienen in:

MATERIALS SCIENCE FORUM ; 600/603 ; 127-130

Erscheinungsdatum:

01.01.2009

Format / Umfang:

4 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

La Via, F. / Izzo, G. / Mauceri, M. et al. | British Library Online Contents | 2009

SiC-4H Epitaxial Layer Growth Using Trichlorosilane (TCS) as Silicon Precursor

Leone, S. / Mauceri, M. / Pistone, G. et al. | British Library Online Contents | 2006

4H-SiC Epitaxial Growth on 2^o Off-Axis Substrates using Trichlorosilane (TCS)

Aigo, T. / Ito, W. / Tsuge, H. et al. | British Library Online Contents | 2012

3C-SiC Heteroepitaxy on (100), (111) and (110) Si Using Trichlorosilane (TCS) as the Silicon Precursor

Anzalone, R. / Severino, A. / D Arrigo, G. et al. | British Library Online Contents | 2009

Epitaxial growth of germanium dots on silicon (001) surface covered by a very thin dielectric layer

Derivaz, M. / Noe, P. / Rouviere, J. L. et al. | British Library Online Contents | 2002

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