Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

Stahlbush, R.E. / Van Mil, B.L. / Liu, K.X. et al. | British Library Online Contents | 2009

Investigation of In-Grown Dislocations in 4H-SiC Epitaxial Layers

Kojima, K. / Kato, T. / Kuroda, S. et al. | British Library Online Contents | 2006

Conversion of Basal Plane Dislocations to Threading Edge Dislocations in Growth of Epitaxial Layers on 4H-SiC Substrates with a Vicinal Off-Angle

Masumoto, K. / Ito, S. / Goto, H. et al. | British Library Online Contents | 2014

Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers

Zhang, Z. H. / Sudarshan, T. S. | British Library Online Contents | 2006

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. et al. | British Library Online Contents | 2009