Evaluation of 4H-SiC Carbon Face Gate Oxide Reliability

Fronheiser, J.A. / Chatterjee, A. / Grossner, U. et al. | British Library Online Contents | 2011

Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Kono, H. / Suzuki, T. et al. | British Library Online Contents | 2009

Impact of post-nitridation annealing on ultra-thin gate oxide performance

He, Y. / Zhang, G. | British Library Online Contents | 2009

Ultra thin gate oxide reliability enhanced by carbon contamination free process

Iwamoto, T. / Ohmi, T. | British Library Online Contents | 1997

Significant Improvement in Reliability of Thermal Oxide on 4H-SiC (0001) Face Using Ammonia Post-Oxidation Annealing

Senzaki, J. / Suzuki, T. / Shimozato, A. et al. | British Library Online Contents | 2010